| Flow Rate, L/min | 10–12 |
| Resistivity, MΩ·cm at 25 °C | Ultrapure Water 18.2 |
| TOC, ppb* | |
| Microorganisms, cfu/mL** | < 10 |
| Heavy Metals, ppm | < 0.01 |
| Silicates, ppb | < 0.01 |
| Total Dissolved Solids, ppm | < 0.03 |
| Dimensions 3-Bowl System |
| Height, cm (in.) | 80 (31.5) |
| Width, cm (in.) | 94.5 (37.2) |
| Depth, cm (in.) | 22 (8.7) |
| Weight (empty), kg (lb) | 32.7 (72) |
| Electrical Requirements | 120 V/60 Hz or 230 V/50 Hz Pump/Motor: 0 – 33 H.P. |